Title:
基板搬送装置、現像装置および現像方法
Document Type and Number:
Japanese Patent JP7204788
Kind Code:
B2
Abstract:
The present invention effectively prevents bubbles generated during development by a developer accumulated on the surface of a substrate from adhering to the surface of a substrate through a transfer roller. The present invention comprises: a transfer roller that rotates and conveys the substrate while supporting the substrate from below; and a bubble removal member disposed below the substrate being transported by the transfer roller without contacting the transfer roller, and removes a protruding part from the main surface of the transfer roller among bubbles generated from the developer accumulated on the conveying substrate and attached to the transfer roller.
Inventors:
Tomoki Akioka
Application Number:
JP2021008431A
Publication Date:
January 16, 2023
Filing Date:
January 22, 2021
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/027; B65G13/04; G03F7/30; H01L21/304; H01L21/677
Domestic Patent References:
| JP2016167475A | ||||
| JP963946A | ||||
| JP58166646U | ||||
| JP1057862A | ||||
| JP628858U | ||||
| JP2004363200A |
Foreign References:
| KR100887580B1 |
Attorney, Agent or Firm:
Swing angle Shoichi
Kazumasa Onishi
Kazumasa Onishi
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