To provide a substrate transport device which prevents a deflection of the substrates and avoids a situation in which the transport environment is contaminated by touching of the substrates with the transport device.
The substrate transport device includes a housing 10 which comprises an upper surface 2, a lower surface 4, side walls 6 composed of a plurality of columns, a rear opening 14 for incoming of the substrates 22, a front opening 12 for outgoing of the substrates 22, a plurality of supporting members 8 that are connected to the side walls 6, and a plurality of axle devices 18. The substrate transportation device further includes a driving unit 16 and a rotation axis 28. If the driving unit 16 generates torque and the rotation axis 28 transfers the torque to the axle devices 18, the axle devices 18 further transfer the torque to the supporting members 8, thereby making incoming/outgoing of the substrates 22 to/from the housing 10 possible.
LU TSUNG-LIN
CHEN YING-CHI
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