Title:
Substrate transport device
Document Type and Number:
Japanese Patent JP6033593
Kind Code:
B2
Inventors:
Shigeo Uchigata
Takeshi Hamakawa
Miyajima Yuya
Takeshi Hamakawa
Miyajima Yuya
Application Number:
JP2012159165A
Publication Date:
November 30, 2016
Filing Date:
July 18, 2012
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
H01L21/677; B65G49/06; B65G51/03
Domestic Patent References:
| JP2009253135A | ||||
| JP9132309A | ||||
| JP2012091122A | ||||
| JP2005350174A | ||||
| JP2008260591A | ||||
| JP2009208909A | ||||
| JP2010238986A |
Foreign References:
| CN102437076A |
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