To provide substrate horizontal/vertical transport equipment which can avoid a phenomenon in which a substrate sags due to its own weight by upwardly pressurize the bottom face of the substrate and can eliminate the necessity to position any additional inverting portion by integrating a substrate processing line into a laminated structure to enable one inverting portion to invert a substrate and supply it to the processing line.

This substrate horizontal/vertical transport equipment includes a frame, at least one horizontal transport means which is installed in the frame and carries a substrate in a fixed position while avoiding sagging of the substrate and can invert the substrate, a vertical transport means which is positioned in the frame so that the vertical transport means can be lifted or lowered and receives the substrate from the horizontal transport means and supplies it to a substrate processing line, and a transport unit which is positioned between the vertical transport means and the substrate processing line and receives the substrate from the vertical transport means and transports it.