Title:
基板輸送用治具及びその製造方法
Document Type and Number:
Japanese Patent JP4671258
Kind Code:
B2
Inventors:
Susumu Yamada
Application Number:
JP2001200730A
Publication Date:
April 13, 2011
Filing Date:
July 02, 2001
Export Citation:
Assignee:
Aron Co., Ltd.
International Classes:
B65D73/00; B65D85/86; H01L21/50
Domestic Patent References:
| JP2000012612A | ||||
| JP7206075A | ||||
| JP2000306975A | ||||
| JP7106799A |
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office