Title:
SUBSTRATE TRANSPORTATION DEVICE AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023033890
Kind Code:
A
Abstract:
To provide a substrate transportation device and a substrate processing device capable of suppressing electrification of a substrate.SOLUTION: A substrate transportation device has: a chamber 20 into which a substrate W is carried; a plurality of transportation rollers 30 that carry the substrate W by rotating in contact with the substrate W in the chamber 20; a plurality of shafts 40 to which the plurality of transportation rollers 30 are fixed, respectively, and each having an extending part 42 with an end part extended to the outside of the chamber 20; a drive part 50 that rotates the transportation rollers 30 by driving the extending parts 42; an endless conductive member 60 bridged over the plurality of extending parts 42, rotating following the rotation of the shafts 40; a conductive electrode part 80 in contact with the conductive member 60; and a ground part 90 for grounding the electrode part 80.SELECTED DRAWING: Figure 1
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Inventors:
OMORI KEIGO
NISHIBE YUKINOBU
NISHIBE YUKINOBU
Application Number:
JP2021139826A
Publication Date:
March 13, 2023
Filing Date:
August 30, 2021
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP
International Classes:
B65G13/071; H01L21/677; H01L21/304; H05F3/02
Attorney, Agent or Firm:
Mitsuharu Kiuchi
Koichi Okuma
Sadanori Katagiri
Kanako Kiuchi
Koichi Okuma
Sadanori Katagiri
Kanako Kiuchi