Title:
SUBSTRATE TRANSPORTATION PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2016176113
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate transportation processing apparatus capable of suppressing disorder of tension occurring to substrates traveling in a plurality of columns, and performing stable substrate processing by stabilizing a substrate transport position.SOLUTION: A substrate transportation processing apparatus is so configured that a substrate transportation part has a main roll part and a sub roll part which are arranged opposite each other and are wound with a plurality of substrates 2 to form a substrate parallel travel part 2a where the plurality of substrates 2 travel. The main roll part and sub roll part have pluralities of individual main rollers 51a-51c and individual sub rolls 52a, 52b, the numbers of which correspond to the number of the substrates 2 at the substrate parallel travel part 2a. The respective individual main rolls 51a-51c are driven by a driving source 54 to rotate through load limiting means 63a-63c each provided for one of the individual main rolls, and the load limiting means 63a-63c temporarily interrupt transmission of driving force from the driving source 54 when torque exceeding the set value is applied to corresponding individual main rolls 51a-51c.SELECTED DRAWING: Figure 3
Inventors:
SAKAI HIROSHI
TERADA TOYOJI
TERADA TOYOJI
Application Number:
JP2015057391A
Publication Date:
October 06, 2016
Filing Date:
March 20, 2015
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
C23C14/56; B65H20/02; B65H26/04; C23C16/54
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