Title:
SUBSTRATE TREATING APPARATUS
Document Type and Number:
Japanese Patent JP2009152395
Kind Code:
A
Abstract:
To reduce a solvent concentration in exhaust gas and to reduce a burden on exhaust equipment by collecting a solvent in the exhaust gas.
The exhaust gas is mixed with deionized water by a static mixer 63 even if the vapor of high-concentration isopropyl alcohol is supplied through a solvent nozzles 17 into a chamber 11 surrounding a treating tank 1. Thus, since the gas, although including the vapor of isopropyl alcohol, is fed to a gas-liquid separator 53 with deionized water, the vapor of isopropyl alcohol is discharged with deionized water. As a result, it is possible to reduce the concentration of isopropyl alcohol in the exhaust gas from the gas-liquid separator 53.
Inventors:
AIHARA TOMOAKI
Application Number:
JP2007328927A
Publication Date:
July 09, 2009
Filing Date:
December 20, 2007
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
H01L21/304; B01D19/00; B01F3/04; B01F5/00; B08B3/04; F26B9/06; F26B21/00; F26B25/14; H01L21/306
Domestic Patent References:
| JP2007273819A | 2007-10-18 | |||
| JP2001237211A | 2001-08-31 | |||
| JPH067752A | 1994-01-18 | |||
| JPS49119271U | 1974-10-12 | |||
| JP2006247597A | 2006-09-21 |
Attorney, Agent or Firm:
Tsutomu Sugiya
Hiroyuki Todaka
Hiroyuki Todaka