PURPOSE: To allow cleaning on the rear of a substrate while suction holding by providing a substrate holding part with an opening on the outside of the substrate sucking part thereof in the radial direction and providing a cleaning liquid ejecting part below the opening.

CONSTITUTION: A disk-like substrate holding surface 4 is provided above a substrate holding part. The substrate holding surface 4 has diameter longer than the diagonal of a rectangular substrate W with a disk-like suction part 10 and a ring-like peripheral part 11 being disposed, respectively, in the center and around the suction part 10. A large number of cleaning holes 14, 15 are disposed concentrically in two rows on the inside of the peripheral part 11 wherein the cleaning holes 14 are located closer to the center than the cleaning holes 15. A plurality of rear side cleaning nozzles 18 are arranged below the cleaning holes 14, 15 with the ejection ports thereof directing the cleaning holes 14, 15 and a pure water supply part is coupled with the rear side cleaning nozzles 18. This constitution allows cleaning on the rear side of a substrate while suction holding.