To provide a substrate treatment apparatus for arranging the connection section of an exhaust pipe for exhausting air or liquid at the lower part of the substrate treatment apparatus, securing maintenance properties of the substrate treatment apparatus, and further reducing cost required for installation.

The substrate treatment apparatus comprises a plurality of substrate treatment units 41-48 for treating a substrate W; a main conveyance robot 30 for conveying the substrate to them; a conveyance chamber 25 for storing the substrate conveyance robot 30 while the substrate W conveyed by the substrate conveyance robot 30 passes; and exhaust pipes 51-58 for exhausting air or liquid from the substrate treatment units 41-48. The substrate treatment units 41-48 are arranged in lamination adjacent to the conveyance chamber 25. The exhaust pipes 51-58 have connection sections 51a-58a to factory power facilities in which the substrate treatment apparatus has been installed at the lower portion of the conveyance chamber 25.