To mount a metal mask and a substrate excellently in operability with respect to a heating base plate by using a metal mask of simple structure in a method for ejecting ultrafine particles from a nozzle and forming fine- patterned article on the substrate.

The substrate 2 is previously attached between holding pieces 1b, 1b which are formed curvedly on the side opposite to the metal mask 1. At this time, the positioning of the metal mask 1 and the substrate 2 is also easily performed by a positioning piece 1c of the metal mask 1. Subsequently, the heating base plate 3 is inserted between the holding pieces 1b, 1b of the metal mask 1 in the state that the metal mask 1 and the substrate 2 are integrated into one body, the substrate 2 and the metal mask 1 are mounted on the heating base plate 3 with a prescribed positional relation.