Title:
圧電薄膜付き基板及び圧電素子
Document Type and Number:
Japanese Patent JP5801364
Kind Code:
B2
Abstract:
A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO3 with a perovskite structure. A curvature radius of a warping of the substrate provided with the piezoelectric thin film due to difference between the first and the second thermal expansion coefficients is 10 m or more at room temperature. The piezoelectric thin film has a thickness of 0.2 μm to 10 μm. The piezoelectric thin film is oriented in one of plane orientations (001), (110), and (111).
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Inventors:
Kenji Shibata
Fumito Oka
Fumito Oka
Application Number:
JP2013192519A
Publication Date:
October 28, 2015
Filing Date:
September 18, 2013
Export Citation:
Assignee:
SIOX Co., Ltd.
International Classes:
H01L41/187; C01G33/00; C23C14/34; H01L41/047; H01L41/08; H01L41/09; H01L41/113; H01L41/18; H01L41/22; H01L41/29; H01L41/316; H01L41/319; H01L41/39
Domestic Patent References:
| JP2006291332A | ||||
| JP2007184513A | ||||
| JP2006080500A | ||||
| JP2000156624A | ||||
| JP2005306021A |
Foreign References:
| US20070126313 | ||||
| EP1796266A1 | ||||
| WO2002027809A1 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation