Title:
多層反射膜付き基板、反射型マスクブランク及び反射型マスク、並びにそれらの製造方法
Document Type and Number:
Japanese Patent JP6713251
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing a multilayer reflection coating-fitted substrate capable of forming a high precision standard mark at a low cost.SOLUTION: Provided is a method for producing a multilayer refection coating-fitted substrate in which multilayer reflection coatings reflecting EUV light are formed on a substrate. The process includes a step where standard marks serving as the standards of the detective position in detective information are formed. The standard mark is composed of a main mark 13a for deciding the standard point of the detective information and an auxiliary mari 13b arranged around the main mark, and the main mark 13a and the auxiliary mark 13b are formed by different methods.SELECTED DRAWING: Figure 6
Inventors:
Lol Ki Tsutomu
Kazuhiro Hamamoto
Youhei Ikebe
Kazuhiro Hamamoto
Youhei Ikebe
Application Number:
JP2015068340A
Publication Date:
June 24, 2020
Filing Date:
March 30, 2015
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03F1/44; G03F1/24; G03F1/84
Domestic Patent References:
| JP2013179270A | ||||
| JP2013222811A |
Foreign References:
| WO2013031863A1 | ||||
| WO2008129914A1 | ||||
| WO2014050891A1 | ||||
| US20090220866 | ||||
| US20140268088 |
Attorney, Agent or Firm:
Patent business corporation Tsukuni