Title:
SUBSTRET PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP3652420
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus, which can readily perform the maintenance work of a housing unit provided inside the main body of the apparatus even when a sufficient space is not available at the outside of the main body of the apparatus.
SOLUTION: A housing unit 60 comprises a first containing part 61 for adjustable devices and a second containing part 62 for the devices, which are not required to be adjusted. A lower base plate 63 is fixed on frames 81 and 82. An upper base plate 67 is attached on the lower base plate 63 through a pair of rail members 66a and 66b. The first containing part 61 is attached to the side close to the outside of an apparatus main body 1 on the upper base plate 67 so that the containing part 61 is freely attached and removed. The second containing part 62 is attached to the rear side of the first containing part 61 on the upper base plate 67 through a pair of rail members 69a and 69b so that the containing part 62 is freely moved.
More Like This:
Inventors:
Taniguchi, Hideyuki
Application Number:
JP1995000285957
Publication Date:
March 04, 2005
Filing Date:
November 02, 1995
Export Citation:
Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
G02F1/1333; H01L21/02; H01L21/027; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; G02F1/1333; H01L21/02; H01L21/027