SUCKING AND FIXING SHEET AND SUCKING AND FIXING METHOD USING THE SHEET

Japanese Patent JPH08257474

A

PURPOSE: To obtain a sucking and fixing sheet from which a worked body is easily released by providing an adhesive layer partially on at least one side of an air-permeable sheet.

CONSTITUTION: This sheet is obtained by providing an adhesive layer 5 partially on at least one side of an air-permeable sheet 4. When a body 6 to be worked is sucked and fixed with the sheet, the sheet is arranged on the base 3 having an air vent 1 and a suction port 2 so that the adhesive layer 5 is placed on the opposite side of the base 3, the body 6 is adhered by the adhesive layer 5, then the side of the base 3 opposite to the sheet is evacuated through the suction port 2, and the body 6 is sucked and fixed on the sheet. The body 6 is worked in a specified manner and then easily released from the sheet since the body is adhered to the sheet with an appropriate adhesive strength through the partially provided adhesive layer 5.

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TACHIBANA TOSHIMITSU
MORIYAMA JUNICHI
UEDA ZENICHI
NAGAI YOZO

JP6364295A

October 08, 1996

March 23, 1995

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NITTO DENKO CORP

G02F1/13; B05C13/02; B05D3/00; B28D7/04; B32B37/00; H01G4/12; H01L21/301; H01L21/304; H01L21/68; H01L21/683; H05K3/00; (IPC1-7): B05C13/02; B05D3/00; B28D7/04; B29D9/00; G02F1/13; H01G4/12; H01L21/68; H01L21/301

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