Title:
SUCTION APPARATUS
Document Type and Number:
Japanese Patent JP3766787
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a suction apparatus which improves rigidity and reduces a size in a heightwise direction while keeping the precision of the flatness of an adhesive disk.
SOLUTION: The suction apparatus includes a stone plate 10 which is produced so that both of upper and lower surface may have prescribed flatness and which has multiple suction holes 10a opening on the side of its upper surface, a suction box body 20 which is arranged on the lower side of the stone plate and the upper surface of which has the same flatness as the prescribed flatness and has a suction passage communicated with the multiple holes, and multiple pressurizing mechanisms 30 which includes a preloaded bolt 31 screwed into the stone plate through the suction box body for giving predetermined pressure between the suction box body and the stone plate. The pressurizing mechanisms have bearing mechanisms permitting mutual deviation in a horizontal direction accompanying expansion and contraction between the suction box body and the stone plate.
Inventors:
Tatsuro Kato
Application Number:
JP2001082815A
Publication Date:
April 19, 2006
Filing Date:
March 22, 2001
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01L21/683; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP63035989U | ||||
| JP63178334U | ||||
| JP63035990U | ||||
| JP63069250A |
Attorney, Agent or Firm:
Kenho Ikeda