To stably and securely suck a mechanically fragile article for conveyance by sufficiently reducing the impact when a suction surface of a suction head is brought in contact with the article.

This suction head for sucking a surface of an article such as a thin glass plate, a plastic sheet, a crystal plate, a ceramics plate and a semiconductor wafer for holding is provided with a fixed part, a suction part for sucking the article for holding, a bellows provided between the fixed part and the suction part and forming a closed air chamber between them, and an air flow passage extended from the outer surface to the air chamber. The gaseous material is supplied to the air chamber through the air flow passage.