Title:
吸引保持パッド
Document Type and Number:
Japanese Patent JP6584889
Kind Code:
B2
More Like This:
Inventors:
Taichi Ito
Application Number:
JP2015182951A
Publication Date:
October 02, 2019
Filing Date:
September 16, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B65G49/07; H01L21/304; H01L21/677
Domestic Patent References:
| JP1132365U | ||||
| JP5033868A | ||||
| JP1101386A | ||||
| JP10078166A |
Foreign References:
| US20020151257 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki