Title:
Suction system
Document Type and Number:
Japanese Patent JP6078750
Kind Code:
B2
More Like This:
| JP6166970 | The oil separator for oil circle method vacuum pumps |
| JP7300494 | cryopump |
| JPS52144811 | SEALING MEANS FOR VACUUM APPARATUS |
Inventors:
Takamasa Hasebe
Yuki Yamada
Fumihiko Yamada
Yuki Yamada
Fumihiko Yamada
Application Number:
JP2013243626A
Publication Date:
February 15, 2017
Filing Date:
November 26, 2013
Export Citation:
Assignee:
Orion Machinery Co., Ltd.
International Classes:
F04B37/16; F04B41/06
Domestic Patent References:
| JP61123777A | ||||
| JP2009133232A |
Attorney, Agent or Firm:
Shinji Sakai