Title:
【発明の名称】露光方法及び半導体素子の製造方法
Document Type and Number:
Japanese Patent JP3173025
Kind Code:
B2
Inventors:
Akiyoshi Suzuki
Application Number:
JP5067191A
Publication Date:
June 04, 2001
Filing Date:
February 22, 1991
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; G03F1/30; G03F1/68; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): H01L21/66; G03F1/08; G03F7/20; H01L21/027
Domestic Patent References:
| JP3173219A |
Attorney, Agent or Firm:
Yukio Takanashi