PURPOSE: To facilitate a super precision processing and to improve the wear resistance and corrosion resistance of the body to be worked, by executing the cutting of the body to be worked after plating the face worked so as to become smaller than the necessary dimension in advance so as to become larger than the necessary dimension and finishing it in the necessary dimension.

CONSTITUTION: In a super precision processing method, the shaft part 3 of a turbine rotor 100 which is the body to be worked is first subjected to a lathe turning so as to become slightly smaller than the necessary dimension. For instance the shaft diameter is cut so as to become smaller to the extent of 100 micron than the necessary diameter. The electroless nickel plating 20 in the thickness like becoming slightly larger than the necessary dimension at the shaft dimension of after plating is executed on the cutting face of after working; 100 micron plating thickness is taken for example. Finally the plating face is subjected to a lathe turning by a precise lathe and the necessary shaft dimension can be obtained easily.