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Title:
SUPER-PRECISION WORKING MACHINE
Document Type and Number:
Japanese Patent JPH05318287
Kind Code:
A
Abstract:

PURPOSE: To enhance the machining accuracy by measuring the actual shape of a work quickly and precisely by the on-machine system, and correcting the machining error by the in-process control on the basis of the data acquired from measurement.

CONSTITUTION: A laser interferometer 9 not likely to be influenced by vibration and the straightness in movement of the guide surface is installed on the X-axis table 5 of a super-precision working lathe. The shape of the machining surface of a work 12 under machining is measured by this laser interferometer 9, and the acquired data is fed to an NC device 19 through a processor 16. The NC device 19 prepares the machining error correction data on the basis of this measuring data, to serve for controlling servo motors 7 and 10 which drive the spindle stock 6 and tool rest 8, respectively.


Inventors:
NAKAGAWA MASAO
Application Number:
JP15586792A
Publication Date:
December 03, 1993
Filing Date:
May 21, 1992
Export Citation:
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Assignee:
OKUMA MACHINERY WORKS LTD
International Classes:
B23Q15/02; B23Q17/20; (IPC1-7): B23Q17/20; B23Q15/02
Domestic Patent References:
JPH0493150A1992-03-25
JPH02287107A1990-11-27
Attorney, Agent or Firm:
Ishida Kiki