To enhance close contact of a YBCO to an electrode which is connected to a normal conductive material and performs input/output of signals, and reduce a contact resistance between them.
A superconducting circuit has an electrical circuit which includes a dielectric substrate and YBCO films as high temperature superconductor that are formed on both sides of the dielectric substrate. The superconducting circuit has an electrode which is formed on a signal transmitting line of the electrical circuit formed with the YBCO film and used to input and output the electric signals of the electrical circuit. The electrode has an aluminum film formed in close contact on the signal transmitting line and a metal film which is formed on the aluminum film and has a smaller resistance than that of the aluminum.
KOIZUMI DAISUKE
SATO KEI
NARAHASHI SHOICHI
JPH07211950A | 1995-08-11 | |||
JPH11214757A | 1999-08-06 | |||
JPH05327047A | 1993-12-10 | |||
JPH10239718A | 1998-09-11 | |||
JPH07211950A | 1995-08-11 |
Next Patent: ILLUMINATION OPTICAL APPARATUS, AND PROJECTION EXPOSURE APPARATUS