To provide a superconducting device and a method of manufacturing the same, having a superconducting thin film with matched axis orientation on a low-cost substrate and with superior superconducting characteristics.
This superconducting device 5 is constituted of a backing substrate 4, an Al film 3 formed on the backing substrate, and a c-axis oriented YBCO film 1 formed on the Al film. The formation of an Al film, an intermediate layer between the backing substrate and the YBCO film makes it possible to improve the c-axis orientation of the YBCO film formed on it. The amorphous substrate may be appropriate for the backing substrate, and among others, a soda potash glass having approximately equal linear expansion coefficient as, that of the YBCO film is suitable for it. An amorphous layer 2 between the Al film and the c-axis orientation YBCO film can effectively suppress the mutual diffusion of the substrate material and the superconducting material at film forming and heat treating AlOx is suitable for the amorphous layer.
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