Title:
SUPERCONDUCTING DEVICE
Document Type and Number:
Japanese Patent JPS63283085
Kind Code:
A
Abstract:
PURPOSE:To prevent an irregularity of a device characteristic and a change in the characteristic with the passage of time and to stabilize an operation by a method wherein a diffusion preventive layer or an evaporation preventive layer used to prevent the diffusion or evaporation of copper is formed on one face or both faces of a thin film of an oxide superconductor. CONSTITUTION:A thin-film diffusion preventive layer 2 of CuO with a thickness of about 100 nm is formed on a sapphire substrate 1 with a thickness of about 500 mum by a high-frequency sputtering method using Ar gas. Then, an oxide superconductor 3 with a thickness of about 1 mum is formed by a sputtering method using a target whose constituent is YBa2Cu2O6.5; it is heat-treated at about 950 deg.C for one hour. Lastly, the oxide superconductor 3 is processed by a sputtering etching method using Ar gas or the like; an electrode whose two parts are coupled by a thin-film part is formed.
Inventors:
NISHINO JUICHI
KAWABE USHIO
HIRANO MIKIO
KAWABE USHIO
HIRANO MIKIO
Application Number:
JP11680887A
Publication Date:
November 18, 1988
Filing Date:
May 15, 1987
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L39/22; C23C14/08; C30B29/22; H01B12/06; H01L39/24; (IPC1-7): C23C14/08; C30B29/22; H01B12/06; H01L39/22
Attorney, Agent or Firm:
Katsuo Ogawa