PURPOSE: To improve the magnetic detection sensitivity (minimum magnetic flux resolution) of a superconducting magnetic sensor.
CONSTITUTION: Metallic films 11 are respectively provided in meander-like patterns on one surfaces of a plurality of substrates 10. The substrates 10 are integrally coupled with each other by means of a metallic cylindrical member 12 passing through the substrates 10 at points corresponding to the end sections of the films 11 on the substrate 10. The surfaces of the films 11 and member 12 are simultaneously coated with first and second oxide superconducting films 1 respectively composed of Y1Ba2Cu3O7-x. films by an electrophoretic method. Then the films 1 and 2 are sintered by heat-treating the films 1 and 2 in an atmosphere containing oxygen and, at the same time, the surfaces of the films 11 and member 12 are changed into insulating films. Therefore, the first oxide superconducting films 1, 1,... of the substrates 10 are connected in series through the second oxide superconducting films 2.
Hideo Nojima
Hidetaka Shintaku
Masaya Nagata
Kiba Masayoshi
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