Title:
SUPERCONDUCTOR LAMINATION STRUCTURE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2006278105
Kind Code:
A
Abstract:
To provide manufacturing method of a superconductor lamination structure capable of forming magnesium boride film having good superconductivity by using a buffer film hardly generating oxidation of magnesium.
A buffer layer 102, for example, composed of nitrogen and gallium like gallium nitride (GaN), is formed on a substrate 101 made of sapphire (aluminum oxide), of which a main surface is turned into a C-face, and a superconductor layer 103 made of magnesium borate is formed on the buffer layer 102 in contact therewith. The thickness of the buffer layer 102 is formed into nearly 250 nm and that of the superconductor layer is formed into nearly 100 to 120 nm.
Inventors:
UEDA KENJI
MAKIMOTO TOSHIKI
MAKIMOTO TOSHIKI
Application Number:
JP2005094511A
Publication Date:
October 12, 2006
Filing Date:
March 29, 2005
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
H01B12/06; C23C16/38; H01B13/00; H01L39/02; H01L39/24
Attorney, Agent or Firm:
Masaki Yamakawa
Hiroro Kurokawa
Shigeki Yamakawa
Hiroro Kurokawa
Shigeki Yamakawa
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