Title:
超臨界乾燥方法
Document Type and Number:
Japanese Patent JP3553838
Kind Code:
B2
Inventors:
Hideo Ikutsu
Application Number:
JP34620599A
Publication Date:
August 11, 2004
Filing Date:
December 06, 1999
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
H01L21/304; F26B7/00; (IPC1-7): F26B7/00; H01L21/304
Domestic Patent References:
| JP3127832A | ||||
| JP8231989A | ||||
| JP11265867A | ||||
| JP7273083A | ||||
| JP11087306A |
Attorney, Agent or Firm:
Masaki Yamakawa