PURPOSE: To product the title hyperfine-grained film functioning as the film while keeping the physical property of the hyperfine grain and applicable to various devices by forming the film of the hyperfine grains with specified packing density and Vickers hardness.
CONSTITUTION: Vacuum chambers 3 and 4 are evacuated to a specified vacuum, a raw substance 1 in a vessel 10 is heated and vaporized, and a voltage is impressed between a substrate 8 and the vessel 10. The vapor is passed through a nozzle 2, and ionized by a filament 5, a grid 6, and an electrode 7. The cluster is thereby accelerated, and a hyperfine-grained film is formed on the substrate 8. At this time, the diameter of the grain is controlled to 10W1,000, the packing density of the grains to ≥30%, or preferably to ≥50%, and the Vickers hardness to ≥20kg/mm2. The packing density is obtained from P(%)=M/V×1/ρ×100. In the equation, P is packing density, M is the weight (g) of the hyperfine-grained film, V is the apparent volume (cm3), and ρ is the diameter of the grain.
TSUDA HISANORI
OMI KAZUAKI
