Title:
SUPERFINE PARTICLES CLASSIFYING DEVICE
Document Type and Number:
Japanese Patent JP2001276661
Kind Code:
A
Abstract:
To classify the superfine particles of nm level by excellent resolvality in a disk type superfine particles classifying device.
A conventional disk type superfine particles classifying device using kinetic movement (gravity) is improved to a superfine particles classifying device using electric mobility. Moreover, a classifying area is improved from one stage to multistage. Applied direct voltage, a kind and a flow rate of sheath gas and a flow rate of carrier gas are made settable in every classifying area so that the classification resolvality is enhanced as the number of stages in classifying area is in eased.
Inventors:
Makino, Toshiharu
Suzuki, Nobuyasu
Yoshida, Takehito
Yamada, Yuka
Seto, Akifumi
Aya, Nobuhiro
Suzuki, Nobuyasu
Yoshida, Takehito
Yamada, Yuka
Seto, Akifumi
Aya, Nobuhiro
Application Number:
JP2000000091902
Publication Date:
October 09, 2001
Filing Date:
March 29, 2000
Export Citation:
Assignee:
MATSUSHITA RESEARCH INSTITUTE TOKYO INCNATL INST OF ADVANCED INDUSTRIAL SCIENCE & TECHNOLOGY METI
International Classes:
B07B4/02; B03C7/02; B07B7/00; B07B4/00; B03C7/00; B07B7/00; (IPC1-7): B03C7/02; B07B4/02; B07B7/00
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