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Title:
SUPERSONIC TRANSDUCER
Document Type and Number:
Japanese Patent JP2009055644
Kind Code:
A
Abstract:

To provide a supersonic transducer which can increas the amplitude of a vibration film upon vibration, and reduce a direct current bias voltage.

This supersonic transducer 1 comprises an upper electrode 10 composed of a vibration film 2 formed of an insulating material, and a conductive film 3 formed on the vibration film 2, and a lower electrode 12 in which a plurality of projections and recesses are formed on a surface opposed to the vibration film 2 of the upper electrode 10, wherein an ultrasonic wave is generated by joining the upper electrode 10 and the lower electrode 12, and applying an alternating current signal between the upper electrode 10 and the lower electrode 12. By joining the upper electrode 10 and the lower electrode 12, air holes 16 which communicate with the outside from a plurality of cavities 14 formed between the upper electrode 10 and the lower electrode 12 are formed in the lower electrode 12.


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JP5734620Ultrasonic probe device and its control method
Inventors:
MATSUZAWA KINYA
TABATA KUNIO
Application Number:
JP2008312743A
Publication Date:
March 12, 2009
Filing Date:
December 08, 2008
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H04R19/00
Domestic Patent References:
JP2005117103A2005-04-28
JPH01269080A1989-10-26
JPS529423A1977-01-25
JP2002010383A2002-01-11
JPS50115519A1975-09-10
Attorney, Agent or Firm:
Kazuya Nishi
Masatake Shiga
Kazunori Onami



 
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