SUPPORT DEVICE FOR WAFER

Japanese Patent JPH0453684

A

PURPOSE: To prevent a wafer from jumping up and to stably support the wafer with the utilization of a rotating force by providing a shoulder for placing the wafer at the center side at least of the apex of a wafer support pin.

CONSTITUTION: There or more wafer support pins 13, 16, 17 are equipped at the position at an equal distance from the center of a turn table 12 and there are shoulder parts 13a, 16a, 17a for placing wafers at the center side at least of the apex parts of the wafer support pins 13, 16, 17. So, the wafer support pins 13, 16, 17 are also rotated by rotating the turn table 12, after placing a wafer 14 on the shoulders 13a, 16a, 17a, and the wafer 14 is firmly supported on the shoulders 13a, 16a, 17a with the space between the turn table 12 and wafer 14 being made negative pressure by the centrifugal force with the rotations of the wafer support pins 13, 16, 17.

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SUZUKI TAKAAKI
IIO KOICHI
MIYAMURA TADASHI

JP15845790A

February 21, 1992

June 15, 1990

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ATLAS KK
SUMITOMO METAL IND

B25B11/00; H01L21/027; H01L21/30; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): B25B11/00; H01L21/027; H01L21/304; H01L21/68

JPS6462861A	1989-03-09
JPS6260027B2	1987-12-14
JPS6462861A	1989-03-09
JP62074908B
JPS5538654A	1980-03-18

Ryuji Inouchi

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