Title:
CLEANING APPARATUS
Document Type and Number:
Japanese Patent JP3172512
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To efficiently remove foreign matters without causing damage of the surface.
SOLUTION: In this apparatus, laser beams emitted from an excimer laser are s-polarized and are irradiated at an angle θ of incidence of e.g. 5° to the surface of a hard disc base sheet 12. Therefore, in comparison with a case of the angle of incidence of 90°, the area of irradiation to the hard disc base sheet 12 is increased and the laser density is decreased. In addition, as the laser beams reflected on the surface of the hard disc base sheet 12 are indirectly irradiated to a foreign matter 44, irradiation dose is increased. In addition, as electric vector of the s-polarized laser beams is oscillated in the parallel direction to the surface of the hard disc base sheet 12, this oscillation energy effectively acts as a force for eliminating the foreign matter 44.
Inventors:
Masayuki Yao
Yuki Hara
Hiroshi Imachi
Makoto Maeda
Yoshito Hayakawa
Yuki Hara
Hiroshi Imachi
Makoto Maeda
Yoshito Hayakawa
Application Number:
JP24821199A
Publication Date:
June 04, 2001
Filing Date:
September 02, 1999
Export Citation:
Assignee:
Kubota Corporation
International Classes:
B08B7/00; B23K26/06; B23K26/073; G02B27/28; H01L21/268; H01L21/304; (IPC1-7): B08B7/00; B23K26/06; G02B27/28; H01L21/304
Domestic Patent References:
| JP6187338A | ||||
| JP191425A | ||||
| JP11507298A |
Attorney, Agent or Firm:
Yoshito Yamada