Title:
結晶成長炉内にヒータを有する支持台
Document Type and Number:
Japanese Patent JP4937221
Kind Code:
B2
Abstract:
A supporting table having heaters inside a crystal-growing furnace includes a table plate and a plurality of supporting posts, wherein the supporting posts support the table plate and are, respectively, electrically connected with the heaters. Each supporting post includes, among others, a graphite electrode post, a metal electrode post, and an anchoring base. The supporting posts are each with its graphite electrode post screwed to a nut portion of the metal electrode post, and with the metal electrode post fixed to a wall of the crystal-growing furnace. The anchoring base includes, among others, a flange and an elastic washer, where the flange is welded to the wall of the furnace, and with the help of elasticity adjustment of the elastic washer, the supporting table can bear an equal distribution of loading from the supporting posts. To distribute weight of the supporting table and to stably secure the supporting table on the wall of the crystal-growing furnace will make a crucible in the furnace not easy to fall down so as to avoid incurring of public casualty. Further, to thin the table plate of the supporting table will facilitate a uniform transfer of heat to the crucible, and will facilitate a uniform crystal growth for silicon slurry when the crucible is cooled.
Inventors:
Show-Jen Leu
Full-Ron Lin
Full-Ron Lin
Application Number:
JP2008250014A
Publication Date:
May 23, 2012
Filing Date:
September 29, 2008
Export Citation:
Assignee:
Green Energy Technology Ink.
International Classes:
C30B29/06; C01B33/02; C30B35/00; F27B1/10
Domestic Patent References:
| JP2007332022A | ||||
| JP2004322195A |
Attorney, Agent or Firm:
Hiroe Associates Patent Office