Title:
支持ユニット
Document Type and Number:
Japanese Patent JP6479585
Kind Code:
B2
Inventors:
Satoshi Yamanaka
Application Number:
JP2015120084A
Publication Date:
March 06, 2019
Filing Date:
June 15, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B24B7/04; H01L21/304
Domestic Patent References:
| JP2003062728A | ||||
| JP2002331452A | ||||
| JP61004638A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office
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