Title:
SUPPORT FOR WORK
Document Type and Number:
Japanese Patent JP2009135307
Kind Code:
A
Abstract:
To provide a support for a workpiece that is conveyed without causing any breakage and any crack by making it afloating with gas.
A sealing space 15 is formed at a lower surface side of an air permeability porosity sheet 14 by supporting the air permeability porosity sheet 14 with mounting members 13 distributed and provided at predetermined intervals, and a pressurization gas supply source 16 is connected to this sealing space 15. The air permeability porosity sheet 14 makes it possible to stay the gas in a space 17 formed on the mounting members 13, while carrying out a swelling in the shape of a convex at each attaching position with the mounting members 13.
Inventors:
GOKO MICHIHISA
TANIGUCHI TOSHIHISA
SAKAIDA ATSUSUKE
ISHIKAWA TOMIICHI
OKAMOTO KEIJI
TANIGUCHI TOSHIHISA
SAKAIDA ATSUSUKE
ISHIKAWA TOMIICHI
OKAMOTO KEIJI
Application Number:
JP2007310915A
Publication Date:
June 18, 2009
Filing Date:
November 30, 2007
Export Citation:
Assignee:
DENSO CORP
International Classes:
H01L21/677; B65G7/06; B65G49/07; B65G51/03
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Tanimitsu Masaharu
Shigeru Takebayashi
Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Tanimitsu Masaharu
Shigeru Takebayashi