SUPPORTING AIR PLATE AND GAS FLOW RESISTOR THEREOF

Japanese Patent JP2014218342

A

PROBLEM TO BE SOLVED: To provide a technique which reduces stress on an object due to a gas flow.SOLUTION: A supporting air plate includes: a gas flow resistor 14 which has a plurality of jet ports narrowing and jetting a supplied gas flow; a first perforated plate-shaped part 11c having a plurality of large diameter hole parts (first gas supply holes) 17a, fitted with a plurality of the gas flow resistors 14, respectively; a second perforated plate-shaped part 11d which is adjacent to the support surface 11a side of the first perforated plate-shaped part 11c and has a small diameter hole part 17b which is located at a position corresponding to the first gas supply hole 17a, communicates with the first gas supply hole 17a, and jets the gas flow toward a compressed gas layer; and a gas flow-facing surface 11e which faces the jet port of the gas flow resistor 14 narrowing and jetting the gas flow of the gas flow resistor 14 and is located at a boundary part between the first perforated plate-shaped part 11c and the second perforated plate-shaped part 11d, with which the gas flow jetted from the jet port of the gas flow resistor 14 collides to be diffused.

TSUNODA KOICHI
YASUDA TAKAHIRO
ITO AKIHIKO
OZAWA HIDEO

JP2013099465A

November 20, 2014

May 09, 2013

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OILES INDUSTRY CO LTD

B65G49/06; B65G51/03; F16C32/06; F16C33/74; H01L21/677

JP2006347719A	2006-12-28
JP2010159164A	2010-07-22
JP3116923U	2005-12-22
JPS63225026A	1988-09-20
JPH04136369U	1992-12-18
JP2011235999A	2011-11-24
JP2006347719A	2006-12-28
JP2010159164A	2010-07-22
JP3116923U	2005-12-22

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