SUPPORTING DEVICE OF SURFACE PLATE, STAGE DEVICE, TESTER OF DEVICE, AND DEVICE MANUFACTURING EQUIPMENT

Title:

SUPPORTING DEVICE OF SURFACE PLATE, STAGE DEVICE, TESTER OF DEVICE, AND DEVICE MANUFACTURING EQUIPMENT

Document Type and Number:

Japanese Patent JP2007235070

Kind Code:

A

Abstract:

To provide a supporting device of a surface plate which can keep the positioning accuracy of a movable stage even when a load on the top surface of the surface plate changes with the movement of the movable stage on the surface plate or even when a pedestal or a floor for bearing the surface plate is deformed.

A surface plate 2 is supported by one or more fixed-position supporting portions 20a to 20c which support the undersurface of the surface plate 2 via fixed support points and fixed-load supporting portions 40a to 40d which support points where the surface plate 2 is bent by the support of the fixed-position supporting portions 20a to 20c. The fixed-load supporting portions 40a to 40d reduce fluctuations in supporting load by expansion and contraction.

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Inventors:

MASE FUMIO
CHIBA KIYOTAKA

Application Number:

JP2006058343A

Publication Date:

September 13, 2007

Filing Date:

March 03, 2006

Export Citation:

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Assignee:

TOKYO SEIMITSU CO LTD

International Classes:

H01L21/66; B23Q1/00

Attorney, Agent or Firm:

Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Ryu Kobayashi
Shimichi Akihisa

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