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Title:
SUPPORTING HEAD COMPRISING FLEXIBLE FILM FOR CHEMICAL MECHANICAL POLISHING SYSTEM
Document Type and Number:
Japanese Patent JP2009033197
Kind Code:
A
Abstract:

To provide a supporting head for a new chemical mechanical polishing device.

The supporting head mounts a substrate on a polishing face. The supporting head comprises a housing connectable to a drive shaft turned together, a base, a gimbal mechanism pivotally coupling the housing to the base to make the base rotatable with respect to the housing, and a flexible film having a fitting surface for the substrate. The flexible film is interconnected to the base, and extends from under the base to form a chamber.


Inventors:
ZUNIGA STEVEN M
BIRANG MANOOCHER
CHEN HUNG
KO SEN-HOU
Application Number:
JP2008258585A
Publication Date:
February 12, 2009
Filing Date:
October 03, 2008
Export Citation:
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Assignee:
APPLIED MATERIALS INC
International Classes:
H01L21/304; B24B37/30; B24B37/32; B24B49/16
Domestic Patent References:
JPH07124862A1995-05-16
JPS63221969A1988-09-14
JPH0569310A1993-03-23
JPS6124150U1986-02-13
JPH06126615A1994-05-10
JPH08229808A1996-09-10
JPH0839422A1996-02-13
JPH07241764A1995-09-19
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Ikeda adult



 
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