Title:
SURFACE ACOUSTIC WAVE DEVICE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3468203
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a device capable of easily forming an electrode, reducing electrode cost, improving insertion loss and extending frequency adjustment range, and superior in electrode adhesive strength to a piezoelectric substrate, by constituting a part of an interdigital electrode (IDT electrode) of α-tantalum.
SOLUTION: In this surface acoustic wave device 1, an IDT electrode 3 is formed on a piezoelectric substrate 2. The IDT electrode 3 has a pair of comb-shaped electrodes 3a and 3b having electrode fingers inserted to each other. Electrode fingers of the IDT electrode 3 are extended in the direction orthogonal to the surface wave propagation direction. Reflectors 4 and 5 are formed on both sides on the surface wave propagation direction of the IDT electrode 3. Reflectors 4 and 5 are grating reflectors and have a structure where plural electrode fingers are short-circuited in both ends. In this surface acoustic wave device 1, α-tantalum is used to constitute the IDT electrode 3 and reflectors 4 and 5.
Inventors:
Masato Kobayashi
Kentoshi Nakagawa
Masato Tose
Toshio Hagi
Toshimaro Yoneda
Kentoshi Nakagawa
Masato Tose
Toshio Hagi
Toshimaro Yoneda
Application Number:
JP2000134917A
Publication Date:
November 17, 2003
Filing Date:
May 08, 2000
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
C23C14/34; H01L21/203; H01L41/09; H01L41/22; H01L41/29; H03H3/08; H03H9/145; (IPC1-7): H03H9/145; C23C14/34; H01L21/203; H01L41/09; H01L41/22; H03H3/08
Domestic Patent References:
| JP63185052A | ||||
| JP10195650A | ||||
| JP819516B2 |
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