Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
Japanese Patent JP3205981
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device which shows an excellent operating characteristic in a high frequency range by attaining a satisfactory propagation velocity V and frequency temperature characteristic TCF and also attaining an improved propagation loss.
SOLUTION: An interdigital electrode having thickness t3 is formed on a diamond layer, and a ZnO layer having the polycrystal C axis orientation is formed over the interdigital electrode on the diamond layer with thickness t1 (t1/t3≥10). Furthermore, an SiO2 layer of thickness t2 is formed on the ZnO layer. The wavelength λ of the surface acoustic wave of the 0-order mode is set within ABCDEFA in regard of kh1=(2π t1/λ) and kh2=(2πt2/λ).
Inventors:
Hiroyuki Kitabayashi
Hideaki Nakahata
Kenjiro Higaki
Satoshi Fujii
Shinichi Shikata
Hideaki Nakahata
Kenjiro Higaki
Satoshi Fujii
Shinichi Shikata
Application Number:
JP27626095A
Publication Date:
September 04, 2001
Filing Date:
September 29, 1995
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H03H9/145; H03H9/02; H03H9/25; (IPC1-7): H03H9/25; H03H9/145
Domestic Patent References:
| JP6164294A | ||||
| JP1236712A | ||||
| JP6041315A | ||||
| JP5864815A | ||||
| JP54119863A |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)