Title:
SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
Japanese Patent JPH06196962
Kind Code:
A
Abstract:
PURPOSE: To provide a surface acoustic wave device using electrode alloy materials having sufficient resistance against stress migration and appropriate for fine workability.
CONSTITUTION: Interdigital electrodes 21 to 27, 31 to 37 are formed on a piezo-electric substrate 10 and these electrodes 21 to 27, 31 to 37 are formed from metals to which a prescribed quantity of elements such as Co, Si and Cu for improving stress migration resistance are added, Zr and/or Hf within the 0.01 to 0.1wt.% range in total are added and B within the 0.01 to 0.1wt.% range is also added, and including Al as an essential component.
Inventors:
YABE TAKAYUKI
OKUBO YUKIO
HONMO HIROSHI
TAKAMI HIDEO
OKUBO YUKIO
HONMO HIROSHI
TAKAMI HIDEO
Application Number:
JP25789493A
Publication Date:
July 15, 1994
Filing Date:
October 15, 1993
Export Citation:
Assignee:
JAPAN ENERGY CORP
International Classes:
H03H9/145; H03H9/25; (IPC1-7): H03H9/25; H03H9/145
Attorney, Agent or Firm:
Kitano Yoshito