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Patent Searching and Data


Title:
SURFACE ACOUSTIC WAVE ELEMENT, ITS MANUFACTURE AND ITS CONNECTOR
Document Type and Number:
Japanese Patent JP11041054
Kind Code:
A
Abstract:

To provide a surface acoustic wave element that has an electrode pattern for comb-shaped electrodes and reflectors or the like with a very small wiring width/wiring pitch (L/S) with high connection reliability and a small insertion loss.

An input terminal 13, an output terminal 22, ground terminals 23, 24, 25, 26 placed on a 1st area 11a of a piezoelectric substrate 11 have a laminating structure with 1st and 2nd conductive films 31, 32 whose end face is tapered (31a), while surface acoustic wave filters 12, 18 placed on a 2nd area 11b are formed continuously from the 1st area 11a to the 2nd area 11b with a single layer structure of the 2nd conductive film 32 directly and electromechanically coupled with the piezoelectric substrate 11. Thus, the coating performance of the 1st conductive film 31 by the 2nd conductive film 32 is improved, and occurrence of micro-crack is prevented in the vicinity of the end face 31a and the film is not broken.


Inventors:
Kuroda, Yasushi
Application Number:
JP1997000191057
Publication Date:
February 12, 1999
Filing Date:
July 16, 1997
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H03H9/145; H03H9/145; (IPC1-7): H03H9/145