To provide a surface acoustic wave (SAW) element and manufacturing method thereof in which a frequency is highly accurately adjusted, and frequency stability is improved in a diamond SAW element coping with a frequency increase, in which an IDT is formed on a substrate of a diamond layered structure.
The SAW element 1 includes a substrate 2, interdigital electrodes 5a, 5b formed on the substrate 2 and an IDT constituted of the interdigital electrodes, wherein a principal surface of the substrate 2 is coated with Ta particles 12 the atomic weight of which is greater than 150 amu and the physical adsorption is reduced, between the interdigital electrodes 5a, 5b in such a degree as not to short-circuit the interdigital electrodes, so that the frequency of the SAW element is adjusted.
YAMAZAKI TADASHI
UMEDA TAKATOSHI
YODA MITSUHIRO
FURUSHIMA YASUSHI
| JPS5994910A | 1984-05-31 | |||
| JP2006238211A | 2006-09-07 | |||
| JPH11163655A | 1999-06-18 | |||
| JP2003264448A | 2003-09-19 |
Masatake Shiga
Kazunori Onami