PURPOSE: To enable measurement at the scattering angle of about 180° by providing a deflection magnet and a deceleration tube while a deflection electrode for correcting the trajectory of scattering beam between the deflection magnet and the deceleration tube.
CONSTITUTION: A deflection magnet 30 comprising an electromagnet is arranged in front of a scattering chamber 14 while the acceleration system of ion beam 3 and the measuring system of scattering beam 3' are arranged such that said deflection magnet 30 will be at the top of a triangle. Since the deflection magnet 30 will deflect the ion beam 3 to be irradiated onto a sample 15 and the scattering beam 3' from the sample 15 in the opposite directions, the scattering angle can be set approximately 180°. Although the trajectory of deflected scattering beam 3' is different with correspondence to the surface composition of the sample 15, it can be corrected through a deflection electrode 40.
MORITA KENJI
MATSUNAMI NORIAKI
MATSUDA KOJI
AOKI MASAHIKO
NISSIN ELECTRIC CO LTD
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