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Title:
表面清掃および粒子計数
Document Type and Number:
Japanese Patent JP4099454
Kind Code:
B2
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Inventors:
Batchelder, John Samuel
Application Number:
JP2003582524A
Publication Date:
June 11, 2008
Filing Date:
April 01, 2002
Export Citation:
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Assignee:
Convey Technology Inc.
International Classes:
G01N1/02; G01N15/02; G01N15/10; G01N15/14
Domestic Patent References:
JP6066702A
Foreign References:
US6207406
US6023597
US5343290
Attorney, Agent or Firm:
Nagoya International Patent Service Corporation
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita



 
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