Title:
Surface roughness measuring machine
Document Type and Number:
Japanese Patent JP6326710
Kind Code:
B2
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Inventors:
Masuda Hikaru
Yoshinori Nekozaki
Yoshinori Nekozaki
Application Number:
JP2014196312A
Publication Date:
May 23, 2018
Filing Date:
September 26, 2014
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
G01B5/00; G01B5/28; G01B21/00; G01B21/30
Domestic Patent References:
| JP2129509A | ||||
| JP2012083253A | ||||
| JP2013515250A | ||||
| JP5248803A | ||||
| JP854202A | ||||
| JP5332938A |
Attorney, Agent or Firm:
Kenzo Matsuura
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