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Title:
SURFACE CONFIGURATION MEASURING METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP2001194139
Kind Code:
A
Abstract:

To provide a surface configuration measuring method and apparatus for measuring the ruggedness of a surface ground by a surface grinder.

The distance between the ground surface S and a reference plane set correspondingly to the ground surface S is measured as surface displacement along a plurality of equally spaced measuring lines L extending perpendicular to a reference line LB within the reference plane, and a measuring position which is at a distance from the reference line LB on each measuring line L is associated with the surface displacement at the measuring position. The average of surface displacements at the same measuring position on all the measuring lines L is calculated as averaged displacement and the measuring position is associated with the averaged displacement so as to obtain an averaged curve from which components derived from surface roughness in the surface configuration of the ground surface S are removed.


Inventors:
OGAWA TOMOHIRO
Application Number:
JP2000002563A
Publication Date:
July 19, 2001
Filing Date:
January 11, 2000
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
G01B21/30; (IPC1-7): G01B21/30
Attorney, Agent or Firm:
Kanai Hideyuki