表面汚染検査システムおよびその検査方法

Title:

表面汚染検査システムおよびその検査方法

Document Type and Number:

Japanese Patent JP4672619

Kind Code:

B2

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Inventors:

Katsuhiko Sato

Application Number:

JP2006228212A

Publication Date:

April 20, 2011

Filing Date:

August 24, 2006

Export Citation:

Assignee:

Toshiba Corporation

International Classes:

G01T1/169; G01T7/00

Domestic Patent References:

Attorney, Agent or Firm:

Hisashi Hatano
Shunguchi Sekiguchi
Akio Saruwatari
Junichi Furukawa

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