SURFACE DEFECT INSPECTING DEVICE

Japanese Patent JP3668294

B2

PROBLEM TO BE SOLVED: To provide a surface defect inspecting device which can deal with the enlargement of a subject without enlarging the device itself.
SOLUTION: This device has a lighting part 30 arranged in such a manner that the light guided from a light source is made linear and emitted to the surface of a subject 31 at an angle θ0, a first image pickup part 35b arranged in the position of the angle θ0 so as to take the image of the positive reflected light from the surface of the subject 31, a second image pickup part 35a arranged in a position perpendicular to the surface of the subject 31 so as to take the image of the diffracted light from the surface of the subject 31, and a third image pickup part 35c arranged in the position at an angle θ1 so as to take the image of the scattered light from the surface of the subject 31. It is further provided with a subject transfer means for relatively moving the lighting part 30, the first, second and third image pickup parts 35b, 35a, 35c and the subject 31, a control means for controlling the subject transfer means, and an image processing means for processing the image data taken by the first, second and third image pickup parts 35b, 35a, 35c.

JPS5892936	FLAW INSPECTING DEVICE
JP2009047476	OPTICAL FILM INSPECTION METHOD

Satoshi Matsuzawa

JP21308895A

July 06, 2005

August 22, 1995

Click for automatic bibliography generation  

Olympus Endo Technology America Inc.

G01N21/88; G01N21/47; G01N21/956; G01N21/958; G06T1/00; G06T7/00; (IPC1-7): G01N21/956; G01N21/958; G06T1/00

JP7218451A
JP6235624A
JP7027709A
JP6094632A
JP5218163A
JP6258230A
JP7190942A
JP6003279A
JP63218847A

Previous Patent: INJECTION CONTAINER

Next Patent: GRAIN REFINING CHAMBER OF HORIZONTAL GRINDING TYPE GRAIN REFINING MACHINE